Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
Description Hydrogen Oxygen Vacuum coating machine Gas mass flow
controller for air
The MFC1000, use of packaging technology makes it possible to
measure different ranges of flow under the same pipe diameter, and
mass production ensures high ridiculousness, high performance and
low cost.
Products calibrated with air are switched to argon, carbon dioxide,
oxygen or carbon monoxide (laughing gas) by the gas selection
command.
A wide range of applications, one set to handle multiple working
conditions. Gas medium: air, nitrogen, oxygen, argon, hydrogen,
carbon dioxide, and other dry, clean and non-corrosive gases
Technical Specification Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
| Data | Numerical value |
| Measuring Range | 20 / 50 / 100 / 200 / 500 / 1000 sccm, 2 / 5 / 10/ 20/50SLPM |
| Accuracy (under calibration condition *) | +-(1.5% +0.5%FS) |
| Repeatability | +-0.5%FS |
| Zero drift full range drift | 0.5%FS/ Year |
| Working range range adjustable ratio | 100:1 |
| Maximum controllable flow | 102%FS |
| Typical response time | 100MS |
| Start up time | 70MS |
| Working temperature | 0-+50℃ |
| * Temperature drift: with the calibration temperature S0℃ each time
of difference, accuracy increased 0.12% |
Product model | Full range pressure loss vented to atmosphere |
The equipment size mm3 |
Pipe connection |
| MFC1000-20/50sccm | 200Pa |
63.5*66.5*22.5
|
1/8”NPT female |
| MFC1000-100/200sccm | 1000Pa |
| MFC1000-500/1000sccm | 1000Pa |
| MFC1000-2/5SLPM | 5kPa | 70.5*74.2*26.0 | 3/8”NPT female |
| MFC1000-10/20SLPM | 35kPa | |
| MFC1000-50SLPM | 50kPa | 101.5*68.5*35.0 | 3/8”NPT female |
Dimension Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
Max Allowable working pressure Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
The maximum allowable working pressure:
MFc1000.20/50/100/200/500/1000sccm:2/5sLpM:145psig(1Mpa)
MFc1000.10/20/50sLpM:59psig(0"4Mpa)
If the pipeline pressure is higher than the maximum working
pressure, please add a pressure regulator at the front of the air
inlet to adjust the pressure below the maximum working pressure.
Order Guide Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
Installation Precautions & Pipe Connection Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
Installation Precautions
Insrtal MFc1000The hole at the bottom of the series mass flow
controller is used for equipment installation and fixation, the
thread size is M3. No straight pipe segment is required for the
inlet or outlet pipes of the device.
Pipe connection
Ensure that the air flows in the same direction as the arrow on the
device.
The inlet and outlet sizes of the equipment (connected to the
process system) are 1/8 "NpT or 3/8"NpT female threads.
We recommend that you use tape wound seal to prevent thread
leakage.
Do not entangle the raw material belt on the two threads nearest to
the equipment body, so as to minimize the possibility of the raw
material belt being involved in the equipment body.
Do not use paint or sealants at the connection between equipment
and process piping. Such compounds entering the equipment body will
cause permanent damage to the mass flow controller.When replacing
the joint, please carefully clean the residual raw tape and debris
of the thread orifice.
Application Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for
air
